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大阪大学グローバルCOEプログラム 次世代電子デバイス教育研究開発拠点

HOME > 実績報告 > 論文 > 杉野 隆
杉野 隆[工学研究科(電気電子情報工学専攻)･教授]
  1. Takashi Futatsuki, Taro Oe, Hidemitsu Aoki, Naoyoshi Komatsu, Chiharu Kimura, and Takashi Sugino, “Low-Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor at High Pressure”, Japanese Journal of Applied Physics 48 (2009) 04C006. (2009).
  2. Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Hidemitsu Aoki, and Takashi Sugino,“Suppression of Cu Oxidation Using Environmentally Friendly Inhibitors under Conditions of High Temperature and High Humidity for Cu/Low-k”, Japanese Journal of Applied Physics 48 (2009) 04C016. (2009).
  3. Hidemitsu Aoki, Daisuke Watanabe, Naoki Ooi, Jeong Jong-Hyeon, Chiharu Kimura, and Takashi Sugino, “Electrochemical Etching of Ru Film for Bevel Cleaning of Back End of Line”, Japanese Journal of Applied Physics 48 (2009) 04C019. (2009).
  4. Naoki Ooi, Hidemitsu Aoki, Daisuke Watanabe, Jong-Hyeon Jeong, Chiharu Kimura, and Takashi Sugino, “Cu Electroplating Process with Magnetic Field for Flexible Device”, Japanese Journal of Applied Physics 48 (2009) 046504 (2009).
  5. Saori Hotta, Hidemitsu Aoki, Kazuhiro Kumeta, Yasuto Hata, Chiharu Kimura, and Takashi Sugino, “Selective Sensing of Multi-Inorganic Ions Using Ion Exchange Fiber Film”, Japanese Journal of Applied Physics 48 (2009) 04C183. (2009).
  6. Daisuke Watanabe, Hidemitsu Aoki, Jong-Hyeon Jeong, Chiharu Kimura, and Takashi Sugino, “Effect of Light Irradiation on Galvanic Corrosion of Metal Gate”, Japanese Journal of Applied Physics 48 (2009) 04C003 (2009).
  7. C. kimura, Y. Yamamuro, H. Aoki, and T. Sugino, “Improved field emission characteristics of carbon nanofiber treated with nitrogen plasma,” Diamond and Related Materials, Vol. 16, Issues 4-7, April-July 2007, pp. 1383-1387 (2007).
  8. Chiharu Kimura, Hiroshi Sota, Hidemitsu Aoki, Takashi Sugino, “Diamond and Related Materials, "Atomic bonds in boron carbon nitride films synthesized by remote plasma-assisted chemical vapor deposition,” Diamond and Related Materials, Vol. 18, 478-481 (2009).
  9. Chiharu kimura, Yutaka Yamamuro, Hidemitsu Aoki and Takashi Sugino,"Improved field emission characteristics of carbon nanofiber treated with nitrogen plasma.", Diamond and Related Materials, 16, 1300(2007).
  10. D.Watanabe, H.Aoki, S.Hotta, C.Kimura, and T.Sugino,"Galvanic Corrrosion Supperession of High-k/Metal Gates using Organic Solvent based HF.", Japanese Journal of Applied Physics, Vol. 47, No. 4, 2008, pp. 2425-2427 (2008).
  11. Daisuke Watanabe, Hidemitsu Aoki, Ryota Moriyama, M.K.Mazumder, Chiharu Kimura and Takashi Sugino,"Characterization of BCN film after wet process for interconnection integration", Diamond and Related Materials, 17, 669 (2008).
  12. H. Aoki, D. Watanabe, S. Hotta, C. Kimura, and T. Sugino, “Corrosion suppression during wet processes in FEOL and BEOL for 45nm node and beyond,” Electrochemical Society Transactions, Vol. 4, No. 1, p. 1010 (2007).
  13. Hidemitsu Aoki, Daisuke Watanabe, Ryota Moriyama, M.K.Mazumder, Naoyoshi Komatsu,Chiharu Kimura and Takashi Sugino,"Influence of Moisture on BCN (LowK) Film for Interconnection Reliability.", Diamond and Related Materials, 17, 628 (2007).
  14. H. Aoki, H. Shima, C. Kimura, and T. Sugino, “Characterization of boron carbon nitride film for humidity sensor,” Diamond and Related Materials, Vol. 16, Issues 4-7, April-July 2007, pp. 1300-1303 (2007).
  15. H. Aoki, K. Miyano, D. Yano, K. Sano, K. Yamanaka, C. Kimura, and T. Sugino, “Rapid sensing of trace ionic substances with the novel porous monolith type ion exchanger,” Polymer Engineering and Science, DOI 10.1002/pen (2007).
  16. Hidemitsu Aoki, Kazuki Miyano, Saori Hotta, Daisaku Yano, Kazuhiko Sano, Koji Yamanaka, Chiharu Kimura, Takashi Sugino,"Amino acid sensing by impedance of porous monolith-type ion exchanger.", Electrochimica Acta, 53 , 6657-6661(2008).
  17. H. Aoki, K. Ohyama, H. Sota, T. Seino, C. Kimura, and T. Sugino, “Characterization of boron carbon nitride film modified by excimer laser annealing,” Applied Surface Science, Vol. 254/2 (2007), pp. 596-599 (2007).
  18. H. Aoki, S. Tokuyama, M. K. Mazumder, D. Watanabe, C. Kimura, and T. Sugino, “A methyl BN film by using tris-di-methyl-amino-boron (TMAB) for future Low-K interlayer," Proc. SPIE, Vol. 6984, 69841W (2008).
  19. H. Aoki, T. Nitta, S. Kuwabata, C. Kimura and T. Sugino,"Improvement of anodic oxidation reaction of a fuel cell using ammonium formate with Pt-Pd catalysts," Electrochemical Soc. Transactions, Vol.16,No.2,849-853 (2008).
  20. Hidemitsu Aoki, Makoto Hara,Takuro Masuzumi, Motaharu K.Mazumder, Naoki Ooi, Daisuke Watanabe, Chiharu Kimura and Takashi Sugino, “Influence of Cu Electroplating Solutions on Boron Carbon Nitride (BCN) Film,” Applied Surface Science, , 255 (6), p.3719-3722 (2009).
  21. Hidemitsu Aoki, Takashi Sasada, Daisuke Watanabe, M.K.Mazumder, Chiharu Kimura and Takashi Sugino,"Dry etching properties of boron carbon nitride (BCN) films using carbon fluoride gas.", Diamond and Relat. Mater. 17, 628 (2008).
  22. Hidemitsu Aoki, Takuro Masuzumi, Daisuke Watanabe, M.K.Mazumder,Hiroshi Sota, Chiharu Kimura and Takashi Sugino, “Influence of oxygen plasma treatment on boron carbon nitride (BCN) films composition,” Applied Surface Science, 255 (6), p.3635-3638 (2009).
  23. K. Miyano, H. Aoki, S. Hotta, N. Fujiwara, D. Yano, K. Sano, K.Yamanaka, C. Kimura and T. Sugino,"Rapid and High Sensitive Detection of Bacteria Sensor using a Porous Ion Exchange Film.", Japanese Journal of Applied Physics, Vol. 47, No. 4, pp. 3240 - 3243 (2008).
  24. K. Ohyama, C. Kimura, M. Aoki, S. Kuwabata, and T. Sugino, “Evaluation of solid ammonium formate oxidation for polymer electrolyte fuel cells,” Electrochemical Society Transactions, Vol. 11, No. 1, p. 1473 (2007).
  25. Kazuki Miyano, Takashi Sugino, Chiharu Kimura, Hidemitsu Aoki,"Characterization of amino acids sensing using a porous ion exchange film with monolith structure", IEEJ Trans. EIS, Vol.127 No.11 p.1848-1852 (2007).
  26. Kazutoshi Ohyama, Takashi Sugino, Tomohiro Nitta, Chiharu Kimura, Hidemitsu Aoki,"Improvement of anode oxidation reaction of a fuel cell using ammonium formate with Pt-Ir catalysts", IEEJ Trans. EIS, Vol. 128, No. 11, 1600-1604 (2008).
  27. M. K. Mazumder, R. Moriyama, D. Watanabe, C. Kimura, H. Aoki, and T. Sugino, “Ag diffusion in low-k material (BCN and SiOC) and its challenges using as an interconnection,” Japanese Journal of Applied Physics, Vol. 46, No. 4B, 2007, pp. 2006-2010 (2007).
  28. M.K. Mazumder, H. Aoki, T. Masuzumi, M. Hara, D. Watanabe, C. Kimura, M. Fukagawa, M. Umeda, M. Kusuhara and T. Sugino, “Properties of Boron Carbon Nitride (BCN) film after plasma ashing,” Diamond and Related Materials, Vol. 18, 419-422 (2009).
  29. N. Komatsu, T. Sugino, C. Kimura, H. Aoki, H. Kurimoto, and K. Chikamatsu, “Characterization of aluminum silicate (AlSiO) insulator film,”IEEJ Transactions on Electronics, Information and Systems, Vol. 127, No. 11, pp. 1822-1825 (2007).
  30. S. Tokuyama, M. K. Mazumder, D. Watanabe, C. Kimura, H. Aoki and T. Sugino,"Properties of Methyl Boron Nitride Film for Next Generation Low-K Interconnection.", Japanese Journal of Applied Physics, Vol. 47, No. 4, pp. 2492-2495 (2008).
  31. Takashi Sugino, Chiharu Kimura, and Hidemitsu Aoki, “Surface properties and field emission of BN and BCN films,” Proc. SPIE, Vol. 6984, 698434 (2008).
  32. Takashi Sugino, Chiharu Kimura, Hidemitsu Aoki,"Surface properties and field emission of boron nitride, “Diamond and Related Materials, Vol. 17, 1764-1769 (2008).
  33. Yuji Morihisa, Chiharu Kimura, Makoto Yukawa, Hidemitsu Aoki, Takumi Kobayashi, Shigeki Hayashi, Seiji Akita, Yoshikazu Nakayama, and Takashi Sugino, "Improved field emission characteristics of individual carbon nanotube coated with boron nitride nanofilm", J. Vac. Sci. Technol. B 26, 872 (2008).
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